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CfT: LA2972C- UCC- RFT for the Supply of a High Aspect Ratio Etcher
- Workarea:
- Laboratory Workarea
- Name of Contracting Authority:
- Education Procurement Service (EPS)
- Title:
- LA2972C- UCC- RFT for the Supply of a High Aspect Ratio Etcher
- CfT CA Unique ID:
- LA2972C
- Evaluation Mechanism:
- Most Economically Advantageous Tender (MEAT)
- Description:
- Tenders are sought for the supply delivery, installation and commissioning of a High Aspect Ratio Etcher for University College Cork. The new etcher will enhance the capabilities at the Tyndall National Institute for the advanced heterogeneous of semiconductor devices. We invite proposals for an advanced etching system capable of performing high aspect ratio silicon (Si) etching using the Bosch process. This equipment will be essential for etching deep Si trenches, facilitating the creation of through silicon vias (TSVs) that are critical for heterogeneous integration. The ideal tool will offer precision, reliability, and efficiency to meet the requirements for the etching of both 100mm and 200mm wafers. Vendors with cutting-edge solutions that can achieve these high standards are encouraged to submit their proposals for this vital component in our technological advancement.
- Procurement Type:
- Supplies
- Directive:
- 2014/24/EU (Classic)
- Procedure:
- Open
- CfT Involves:
- A Public Contract
- CPV Codes:
-
38000000-Laboratory, optical and precision equipments (excl. glasses)
31720000-Electromechanical equipment
31700000-Electronic, electromechanical and electrotechnical supplies
- Award per Item:
- No
- Inclusion of e-Auctions :
- No
- NUTS codes:
- IE
- Estimated value (EUR):
- 900,000
- Awarded (CAN) value:
- 900,000
- Above or Below threshold:
- Above
- Time-limit for receipt of tenders or requests to participate:
- 19/08/2024 12:00
- Deadline for dispatching invitations:
- End of clarification period:
- 08/08/2024 12:00
- Upload of documents within the clarifications:
- Yes
- Tenders Opening Date:
- 19/08/2024 12:30
- Allow suppliers to make an online Expression Of Interest:
- Yes
- Contract awarded in Lots:
- No
- Contract duration in months or years, including any options and renewals:
- 48 months
- Validity of Tender in days or months:
- 12 months
- EU funding:
- No
- Multiple tenders will be accepted:
- Yes
- Date of Publication/Invitation:
- 19/07/2024 07:50
- TED links for published notices:
-
https://ted.europa.eu/udl?uri=TED:NOTICE:496638-202...
https://ted.europa.eu/udl?uri=TED:NOTICE:435670-202...
https://ted.europa.eu/udl?uri=TED:NOTICE:628309-202...
- Date of Awarding:
- 24/09/2025 09:36
- Language of publication:
- EN
- Number of openers:
- Two